JPS6239560B2 - - Google Patents

Info

Publication number
JPS6239560B2
JPS6239560B2 JP6547279A JP6547279A JPS6239560B2 JP S6239560 B2 JPS6239560 B2 JP S6239560B2 JP 6547279 A JP6547279 A JP 6547279A JP 6547279 A JP6547279 A JP 6547279A JP S6239560 B2 JPS6239560 B2 JP S6239560B2
Authority
JP
Japan
Prior art keywords
photoresist
insulating layer
thin film
pattern
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6547279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55157296A (en
Inventor
Hikari Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP6547279A priority Critical patent/JPS55157296A/ja
Publication of JPS55157296A publication Critical patent/JPS55157296A/ja
Publication of JPS6239560B2 publication Critical patent/JPS6239560B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
JP6547279A 1979-05-25 1979-05-25 Method of fabricating high density multilayer wiring substrate Granted JPS55157296A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6547279A JPS55157296A (en) 1979-05-25 1979-05-25 Method of fabricating high density multilayer wiring substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6547279A JPS55157296A (en) 1979-05-25 1979-05-25 Method of fabricating high density multilayer wiring substrate

Publications (2)

Publication Number Publication Date
JPS55157296A JPS55157296A (en) 1980-12-06
JPS6239560B2 true JPS6239560B2 (en]) 1987-08-24

Family

ID=13288079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6547279A Granted JPS55157296A (en) 1979-05-25 1979-05-25 Method of fabricating high density multilayer wiring substrate

Country Status (1)

Country Link
JP (1) JPS55157296A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151497A (ja) * 1983-02-18 1984-08-29 日本電気株式会社 高密度多層配線基板
JPS59151498A (ja) * 1983-02-18 1984-08-29 日本電気株式会社 高密度多層配線基板

Also Published As

Publication number Publication date
JPS55157296A (en) 1980-12-06

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